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ANLET roots vacuum pump ANLET Co., Ltd - www.anlet.co.jp
- 1-25 Takara, Kanie-cho, Ama-gun, Aichi 497-8531, Japan

email, Tel +81 0567-95-1211 		products: Roots type vacuum pumps


KOMIYAMA Electron vacuum equipment for FPD and semiconductor manufacturing KOMIYAMA Electron Co., Ltd - www.komiyamae.co.jp
- 2278 Narusawa-mura, Minamituru-gun, Yamanashi, 401-0320, Japan

email, Tel. (+81)555-85-2844
products: vacuum equipment for FPD and semiconductor manufacturing

We have established high level technology necessary for design, parts machining, assembling, adjustment and installation of vacuum equipment.


TOYOTA Industries Corporation - www.toyota-industries.com
- 2-1 Toyoda-cho, Kariya-shi, Aichi 448-8671, Japan

email, Tel. +81-566-27-5699 		products:
  • T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom.
  • T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition.
  • T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.

 

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