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email, Tel. +39 02 9009 3082
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing, thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products, biopharmaceutical manufacturing.
- Gas Analyzers - Mass Spectrometry: Quadrupole Mass Spectrometer, Residual Gas Analysis, Process Monitor and Process Control Products
- MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA's, analytical equipment, and process RGAs and control software.
- For general residual gas analysis, the performance of MicroVision Plus residual gas analyzer, coupled to the wide range of configurations available, make it the ideal choice for many different residual gas analyzer applications, including ultra high vacuum (UHV), such as vacuum coatings, accelerators and high energy physics, harsh environments, such as high temperature and ionizing radiation, high performance, research and development for high mass species studies, and high resolution studies, including low molecular weight species studies and helium from Deuterium studies.